Apparatus and method for automatically controlling semiconductor manufacturing process in semiconductor factory automation system

摘要

A method for automatically controlling a semiconductor manufacturing process in a semiconductor factory, includes the steps of: a) receiving a lot specification data and a lot process data; b) comparing the lot specification data with the lot process data to determine whether a difference between the lot specification data and the lot process data is within a predetermined range; c) if a difference between the lot specification data and the lot process data exceeds or falls below a predetermined range, generating a first message representing an occurrence of an abnormally manufactured lot; d) generating a first transaction in response to the first message, the first transaction representing that the lot is abnormally manufactured; and e) storing the first transaction into a storage unit, so that a next lot process to the abnormally manufactured lot is prevented.