| 摘要 |
According to one exemplary embodiment, a probe card comprises at least one shielded probe needle. The at least one shielded probe needle comprises a conductor, a dielectric sleeve surrounding at least a portion of the conductor, and a conductive cover surrounding the dielectric sleeve. In accordance with one embodiment, the shielded probe needle operates as a coaxial transmission line and has a substantially constant characteristic impedance. As such, signal attenuation at high frequencies is substantially reduced. Also in the exemplary embodiment, the conductive cover is connected to a ground (or to a reference voltage) and shorts any current in the conductive cover to the ground (or to the reference voltage), thereby substantially reducing or eliminating crosstalk in the probe card. According to one embodiment, the probe card may further comprise an unshielded probe needle, which is not surrounded by a dielectric sleeve or a conductive cover.
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