发明名称 Microelectronic fabrication production control method and system providing enhanced microelectronic fabrication facility utilization flexibility
摘要 Within both a method for controlling microelectronic fabrication production and a system for controlling microelectronic fabrication production there is developed and evaluated for a plurality of microelectronic fabrication facilities a plurality of demand, allocation and output management plans prior to assigning and entering within at least one microelectronic fabrication facility a microelectronic fabrication order. The development and evaluation of the plurality of demand, allocation and output management plans provides for enhanced flexibility when assigning and entering the microelectronic fabrication order.
申请公布号 US6728586(B2) 申请公布日期 2004.04.27
申请号 US20020047329 申请日期 2002.01.14
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD 发明人 CHANG CHAO-HSIN;WEN CHENG-HSI;LIOU EDWIN
分类号 G05B19/418;G06F19/00;G06Q10/00;G06Q50/00;(IPC1-7):G06F19/00 主分类号 G05B19/418
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