| 发明名称 |
LOW TEMPERATURE TEXTURING LAYER TO ENHANCE ADHESION OF SUBSEQUENT LAYERS |
| 摘要 |
<p>A method of forming a film on a substrate. In accordance with the invention, an adhesion layer is formed on the substrate. The adhesion layer is chemically bonded to the substrate and has a textured surface. The film is then formed on the textured surface of the adhesion layer.</p> |
| 申请公布号 |
AU2003279758(A1) |
申请公布日期 |
2004.04.23 |
| 申请号 |
AU20030279758 |
申请日期 |
2003.10.03 |
| 申请人 |
PAN JIT AMERICAS, INC. |
发明人 |
MICHAEL ADAMSON;MICHAEL KOUNTZ;RANDY OLSEN |
| 分类号 |
C08L63/00;H01L;H01L21/44;H01L27/146;H01L31/00;H01L31/09;H01L31/18 |
主分类号 |
C08L63/00 |
| 代理机构 |
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代理人 |
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