| 摘要 |
<p>Micro-pump comprises a pump membrane (5) which moves by changing the volume of a pump chamber (7) lying next to the membrane and a base part (1), and two valves arranged in recesses (10, 11) in the base part to react to pressure in the pump chamber and to open and close an inlet channel (8) and an outlet channel (9) for the medium to be conveyed. The valves are formed by a valve seat and a valve body (13). An Independent claim is also included for the duplicate production of micro-pumps.</p> |
