| 摘要 |
PROBLEM TO BE SOLVED: To materialize a pattern connection precision inspecting method capable of inspecting, with high precision and at a high speed, the connection precision at a region boundary part of a pattern plotted in each of a plurality of regions. SOLUTION: As for patterns in which only one of X and Y can be measured in a reference image, its direction is set as an attribute of a pattern image of the reference region. Further, as for patterns in which both X and Y directions can be measured, both directions are set as the attribute of the pattern image of the reference region. A secondary electronic signal detected by making the electron beams scan each inspection region (a region having attribute data measurable in an X direction) is stored in an image memory 44 together with its attribute data (positional coordinates and measurable directions, etc.) as an inspection image. The reference image and the inspection image corresponding to an inspection location are compared with each other, and as a result, a shear amount of a field connection part in the X direction is detected. COPYRIGHT: (C)2004,JPO |
