| 发明名称 |
Electron microscopy system and electron microscopy method |
| 摘要 |
A probe-forming electron microscopy system 1 (SEM) is proposed which comprises a position-sensitive detector 15. As a result, position-dependent secondary electron intensities in the object plane 7 or angle-dependent secondary electron intensities in the object plane 7 may be observed.
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| 申请公布号 |
US2004075054(A1) |
申请公布日期 |
2004.04.22 |
| 申请号 |
US20030636626 |
申请日期 |
2003.08.08 |
| 申请人 |
LEO ELEKTRONENMIKROSKOPIE GMBH |
发明人 |
KNIPPELMEYER RAINER |
| 分类号 |
H01J37/29;H01J37/05;H01J37/147;H01J37/244;H01J37/28;(IPC1-7):H01J37/256 |
主分类号 |
H01J37/29 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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