POSITIONIERUNGSGERÄT MIT EINEM REFERENZRAHMEN FÜR EIN MESSSYSTEM
摘要
The positioning appts. includes an substrate table (1), a subsystem for processing an object on the table, a drive unit (21) displacing the table, and a system (39) measuring the position of table w.r.t. the subsystem. The drive unit has a stationary part fastened to the positioning appts. machine frame co-operating with the measuring system's stationary and movable parts fastened to the table. The measuring system stationary part is fastened to the positioning appts. reference frame dynamically isolated from the machine frame.
申请公布号
DE69629087(T2)
申请公布日期
2004.04.22
申请号
DE1996629087T
申请日期
1996.04.29
申请人
ASML NETHERLANDS B.V., VELDHOVEN
发明人
VAN ENGELEN, GERARD;SPERLING, BERNHARD;JANSSEN, WILHELMUS;BOUWER, GERARDUS;VAN DIJK, DIONYSIUS;VAN KIMMENADE, MATHIJS;VAN EIJK, JAN;VAN DER PAL, ADRIANUS