DEFLECTOR, METHOD OF MANUFACTURING DEFLECTOR, AND CHARGED PARTICLE BEAM EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a deflector that can accurately deflect a charged particle beam and has a long service life. SOLUTION: This deflector which deflects the charged particle beam is provided with a substrate having an opening formed for passing the charged particle beam and a first and a second conductive members provided in the opening to deflect the charged particle beam and formed by plating. The second conductive member is provided on the surface of the first conductive member and is more hardly oxidized than the first conductive member. In addition, the first conductive member is formed of a material which is smaller in residual stress than the second conductive member. COPYRIGHT: (C)2004,JPO