| 摘要 |
PROBLEM TO BE SOLVED: To provide a small variable capacitor having high capacitance and variation rate of capacitance in which the capacitance can be adjusted finely, and to provide its manufacturing process. SOLUTION: The variable capacitor comprises a substrate (21), a lower movable electrode (35) and an upper movable electrode (37) supported on the substrate, and a plurality of actuators (27<SB>1</SB>-27<SB>4</SB>) for the lower movable electrode and actuators (29<SB>1</SB>-29<SB>4</SB>) for the upper movable electrode supported on the substrate and driving the movable electrodes. Since a capacitor and a piezoelectric actuator are formed to be supported on the same substrate, the size is reduced. Furthermore, both electrodes constituting the capacitor are movable, the capacitance and the variation rate thereof are high, and the capacitance can be adjusted finely. COPYRIGHT: (C)2004,JPO
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