发明名称 PLATING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a photoresist composition and a method which are suitable for depositing a very thick photoresist layer in a single coating process. <P>SOLUTION: A volume mehtod which is generally concerned with a field of metal plating and specially for plating an electronic device with a metal bump such as a solder bump includes a process of depositing on a base a photosensitive composition which consists of a binder polymer with (met)acrylate units, a radical-polymerizable bridging agent, a light-activated component, and an organic solvent, is of &ge;45% in solid concentration, and contains substantially no water and a process of rotating it at a high speed and for a long time enough to obtain a photosensitive layer with a uniform thickness of &ge;50 microns. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2004126508(A) 申请公布日期 2004.04.22
申请号 JP20030105231 申请日期 2003.04.09
申请人 SHIPLEY CO LLC 发明人 FORMAN ROBERT S;STEEPER JILL E;HUENGER ERIC C
分类号 G03F7/00;C25D5/02;G03F7/027;G03F7/16;G03F7/40;H01L21/027;H01L21/288;H01L21/60 主分类号 G03F7/00
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