| 摘要 |
PROBLEM TO BE SOLVED: To provide an eyelid for increasing an intake quantity of clean air in a clean space without increasing air conditioning operation cost of a clean room. SOLUTION: The opening area of an air introducing port (a) is expanded by rotating an opening area changing plate 15 arranged in an upper part of a peripheral wall 11 of the eyelid 10 in a vertical plane to thereby increase the intake quantity of clean air in the clean space 10a. As a result, the sticking preventive effect of a particle and a chemical substance to an exposure surface of a silicon wafer arranged in a flatness measuring device 12 can be enhanced without quickening a blowing speed of the clean air blown toward the clean space 10a from the ceiling of the clean room. Thus, the air conditioning operation cost of the clean room is maintained still in a present state. COPYRIGHT: (C)2004,JPO
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