发明名称 Stripping method
摘要 Compositions and methods for the removal of patterned photodefinable materials, such as photoresists and/or photoimageable dielectric materials, from substrates are provided. Such compositions and methods are useful in the manufacture of electronic devices. Methods of reworking electronic device substrates by removing patterned photodefinable material from an underlying organic film are also provided.
申请公布号 US2004076910(A1) 申请公布日期 2004.04.22
申请号 US20030408044 申请日期 2003.04.05
申请人 SHIPLEY COMPANY, L.L.C. 发明人 RUTTER EDWARD W.;TRAN CUONG MANH;ORR EDWARD C.
分类号 G03F7/42;(IPC1-7):G03F7/004;G03F7/00 主分类号 G03F7/42
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