OPTICAL-READY SUBSTRATES WITH OPTICAL WAVEGUIDE CIRCUITS AND MICROELECTRONIC CIRCUITS

摘要

An article of manufacture comprising an optical-ready substrate (10) made of a first semiconductor layer (12), an insulating layer (14) on top of the first semiconductor layer, and a second semiconductor layer (16) on top of the insulating layer. An optical waveguide circuit (30) and photodetectors (32) are buried under the insulating layer. Electrical signals (33) are transferred via conducting lines (59) towards/from an microelectric circuit located on top of the substrate, and optical signals are coupled into/out of the optical waveguide circuit via mirrors (47).