发明名称 SUPPORT FOR SUBSTRATES AND COMPOUND COMPRISING A SUPPORT SUBSTRATE AND AN EXTREMELY THIN SUBSTRATE
摘要 The invention relates to a compound comprising: - an extremely thin substrate that is provided with a thickness of < 0.3 mm and a top face and a bottom face; and - a support substrate having a top face and a bottom face. The extremely thin substrate is removably connected to the support substrate by means of a joining material that connects the top face of the extremely thin substrate and the top face of the support substrate and/or the edge region of the extremely thin substrate and the support substrate. Said compound is characterized by the fact that the joining material is temperature-resistant within the range of -75 DEG C to + 400 DEG C.
申请公布号 WO2004033197(A2) 申请公布日期 2004.04.22
申请号 WO2003EP10907 申请日期 2003.10.02
申请人 SCHOTT GLAS;CARL-ZEISS-STIFTUNG TRADING AS SCHOTT GLAS;CARL-ZEISS-STIFTUNG;KNOCHE, SILKE;BOOSS, CLAUDIA;ASTHEIMER, STEFFEN;WEBER, GERHARD;HABECK, ANDREAS;OTTERMANN, CLEMENS;PLICHTA, ARMIN;RUDAS, GERD;BOEHM, FRANK;VOGES, FRANK;ZETTERER, THOMAS;ESEMANN, HAUKE 发明人 KNOCHE, SILKE;BOOSS, CLAUDIA;ASTHEIMER, STEFFEN;WEBER, GERHARD;HABECK, ANDREAS;OTTERMANN, CLEMENS;PLICHTA, ARMIN;RUDAS, GERD;BOEHM, FRANK;VOGES, FRANK;ZETTERER, THOMAS;ESEMANN, HAUKE
分类号 B32B17/00;B32B33/00;C03C27/06;C03C27/10;C03C27/12;H01L21/00;H01L21/68 主分类号 B32B17/00
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