| 摘要 |
PROBLEM TO BE SOLVED: To realize a plasma ion source mass spectroscope in which a deterioration in measuring work efficiency is suppressed, clogging of a nebulizer can be detected and elimination operation, etc., can be carried out. SOLUTION: The flow quantity and pressure of test piece solution 1 inside a pipe to feed the test piece solution 1 to the nebulizer 3 are detected by sensors 10 and 11. The ion detection strength is compensated according to the detected flow quantity when the flow quantity is from less than a specified value to 50% of initial value. When the flow quantity is < 50% of the initial value and the detected pressure is varied for more than a constant width and for more than a constant time, the measuring is interrupted and cleaning solution 13 is fed to the nebulizer 3 and the pipe instead of the test piece solution 1. When the flow quantity of the cleaning solution 13 becomes the same quantity as the initial flow quantity of the test piece solution, the test piece solution 1 is fed instead of the cleaning solution 13 and the measuring is started again. An accurate quantification is possible when the flow quantity is less than the initial value up to 50% of it. At this time, there is no need to stop the apparatus, etc., and no deterioration in measuring work efficiency arises. COPYRIGHT: (C)2004,JPO
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