| 摘要 |
PROBLEM TO BE SOLVED: To provide a feed apparatus using a linear motor, capable of realizing high acceleration performance and cost reductions by eliminating deformation to a table or linear guide by the magnetic attraction of a linear motor and by reducing the weight of the table. SOLUTION: A moving element 49 of a linear motor is installed on the table 66 via a pressing section 68 and a ball cage 72, without being fixed directly on the table 66. When the linear motor generates thrust by applying a current to the linear motor, the thrust is transmitted to the table 66 from the pressing section 68 via the ball cage 72 to drive the table 66 in the direction of an arrowhead 65. Even if magnetic attraction is produced at the linear motor, the structure of the pressing section 68 is such that the section 68 slides over the ball cage 72 and then slides in the direction of an arrowhead 74, which permits magnetic attraction to be developed, thus giving no influence on the table 66. COPYRIGHT: (C)2004,JPO
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