| 摘要 |
The present invention provides a compact long-service-life microstructure having less unnecessary vibration even at a large torsion angle and its fabrication method. Specifically, it provides a microstructure in which a movable plate is supported by an elastic support portion so that it can be freely torsion-vibrated to the support substrate about a torsion axis, wherein at both ends of a first section in which a concave portion is formed, a second section in which a concave portion is not formed is arranged, and the second section connects with the movable plate and the support substrate.
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