| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a functional element which is obtained by a simple manufacturing method and has a precision pattern and the formed functional part of which is hardly affected by oxygen, water vapor, etc., with the passage of time. <P>SOLUTION: The functional element has a property change layer in which properties are changed by the action of a photocatalyst by irradiation with energy, a functional part formed along the pattern with the properties of the property change layer changed, and a gas-barrier layer formed to cover the property change layer and the functional part. <P>COPYRIGHT: (C)2004,JPO |
