发明名称 |
Laser chemical fabrication of nanostructures |
摘要 |
Disclosed is a process for fabricating luminescent porous material, the process comprising pre-treating a substrate (e.g. crystalline silicon) with laser radiation (e.g from a Nd:YAG laser) in a predetermined pattern followed by exposing the irradiated substrate to a chemical stain etchant (e.g. HF:HNO3:H2O) to produce a luminescent nanoporous material. Luminescent porous material having a luminescence maximum greater than about 2100 meV may be produced by this method. Such nanoporous materials are useful in optoelectronic and other semiconductor devices.
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申请公布号 |
US2004076813(A1) |
申请公布日期 |
2004.04.22 |
申请号 |
US20020271549 |
申请日期 |
2002.10.17 |
申请人 |
NATIONAL RESEARCH COUNCIL OF CANADA |
发明人 |
HAN YUJIE;NIKUMB SUWAS KRISHNA;LUAN BEN LI;NAGATA JOHN |
分类号 |
B23K26/00;(IPC1-7):B32B3/26 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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