DRIVER OF LIQUID DROP EJECTION HEAD, FILM DEPOSITION SYSTEM, DRIVING METHOD OF LIQUID DROP EJECTION HEAD, PROCESS FOR DEPOSITING FILM, AND PROCESS FOR MANUFACTURING ELECTRONIC APPARATUS AND DEVICE

摘要

PROBLEM TO BE SOLVED: To eject a liquid drop stably from a liquid drop ejection head over a long term by suppressing deterioration of a piezoelectric oscillator.

SOLUTION: The driver of a liquid drop ejection head comprises a piezoelectric oscillator 20 expanding/contracting with a specified driving waveform, a drive control circuit 10 as a drive control means, and a driving waveform generating circuit 30. The drive control circuit 10 generates a curved driving waveform having no sharp edge based on a waveform being generated from the driving waveform generating circuit 30 and drives the piezoelectric oscillator 20.

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