| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control system having high safety and productivity, and to provide an aligner incorporating the system. SOLUTION: The temperature control system in a preferred embodiment comprises a chamber 23, a cooler 29 for cooling an inert gas which is supplied to the chamber 23, circulation paths 2, 3 for circulating the inert gas via the chamber 23 and the cooler 29, a cut-off valve 8 arranged between the chamber 23 and the outlet of the cooler 29 in the circulation paths 2, 3, and a cut-off valve 5 arranged between the chamber 23 and the inlet of the cooler 29 in the circulation paths 2, 3. COPYRIGHT: (C)2004,JPO
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