METHOD OF MANUFACTURING ELECTROPHOTOGRAPHIC PHOTORECEPTOR, ELECTROPHOTOGRAPHIC PHOTORECEPTOR, AND ELECTROPHOTOGRAPHIC DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an electrophotographic photoreceptor which prevents abnormally grown portions known as spherical protrusions 203 from appearing on images even if such portions exist on the surface of the photoreceptor and which can markedly improve image defects. SOLUTION: The method of manufacturing the electrophotographic photoreceptor is characterized by including a first step which includes a process of installing a substrate 201 having a conductive surface within a vacuum sealable deposition furnace provided with a venting means and a gaseous raw material supplying means and deposing a first layer 202 consisting of at least the non-single crystalline material on the substrate by decomposing the gaseous raw material by high-frequency electric power; a second step, which includes a process of depositing the first layer and exposing the substrate to the automatically; and a third step, which includes a process of depositing a second layer including an upper inhibition layer 205 consisting of the non-single crystalline material on the first layer. COPYRIGHT: (C)2004,JPO