发明名称 |
Contact probe, method of manufacturing the contact probe, and device and method for inspection |
摘要 |
A method of manufacturing a contact probe includes an electroforming step of, using a resist film (522) arranged on a substrate (521) as a pattern frame having a shape corresponding to a contact probe, performing electroforming to fill a gap in the resist film (522) to form a metal layer (526), a tip end shaping step of obliquely removing and sharpening that part of the metal layer (526) which serves as a tip end portion of the contact probe, and a take-out step of taking out only the metal layer (526) from the pattern frame.
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申请公布号 |
US2004075454(A1) |
申请公布日期 |
2004.04.22 |
申请号 |
US20030470399 |
申请日期 |
2003.12.08 |
申请人 |
HIRATA YOSHIHIRO;HAGA TSUYOSHI;NUMAZAWA TOSHIYUKI;NAKAME KAZUO;OKADA KAZUNORI;YORITA JUN |
发明人 |
HIRATA YOSHIHIRO;HAGA TSUYOSHI;NUMAZAWA TOSHIYUKI;NAKAME KAZUO;OKADA KAZUNORI;YORITA JUN |
分类号 |
G01R1/067;G01R3/00;G01R15/24;(IPC1-7):G01R31/02 |
主分类号 |
G01R1/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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