| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor position detection element with suppressed output variations. <P>SOLUTION: A PSD is constituted by sticking bulk semiconductor substrates L, U to each other. Herein, since variations of impurity concentration are very small, output variations can be suppressed. Further, output variations caused by deterioration of an interface with an oxide film OX can be suppressed by providing an insensible region just under the oxide film OX. <P>COPYRIGHT: (C)2004,JPO</p> |
