ORGANOZIRCONIUM COMPOSITE AND METHOD FOR SYNTHESIZING THE SAME, RAW MATERIAL SOLUTION CONTAINING THE SAME, AND METHOD FOR FORMING LEAD ZIRCONATE TITANATE THIN FILM

摘要

PROBLEM TO BE SOLVED: To prepare a raw material solution which is specific in (1) having a decomposition temperature near the respective decomposition temperatures of an organolead compound and an organotitanium compound, (2) precisely controlling the composition of a PZT thin film over a broad temperature range, (3) hardly reacting with the organolead compound even when being mixed with the same and (4) hardly causing gas phase decomposition. SOLUTION: The raw material solution comprises one or more zirconium chelate complex containing, as a ligand, both of a firstβdiketone and a secondβdiketone having a structure different from that of the firstβdiketone, wherein, when at least two zirconium chelate complexes are contained, the coordination numbers of the firstβdiketone and the secondβdiketone that coordinate to at least two zirconium chelate complexes vary depending on the respective zirconium chelate complexes. COPYRIGHT: (C)2004,JPO