| 摘要 |
PROBLEM TO BE SOLVED: To simplify a conveyance mechanism in a vacuum furnace by conveying a treatment object from a cooling chamber to a heating chamber and from the heating chamber to the cooling chamber by one conveying means. SOLUTION: In the vacuum furnace provided with the heating chamber K carrying out heat treatment of the treatment object X mounted on a mounting block T, and the cooling chamber R carrying out cooling treatment, the treatment object X sent in from a carrying-in opening R1 provided in the cooling chamber R is conveyed to the heating chamber K through the cooling chamber R, the treatment object X subjected to the heat treatment in the heating chamber K is conveyed to the cooling chamber R, the treatment object X is cooled by dipping it in a coolant Y, and the treatment object X subjected to the cooling treatment in the cooling chamber R is sent out from the carrying-in opening R1. It is provided with an engagement part 2 of a predetermined shape, and the conveying means for conveying the treatment object X in the cooling chamber R to the heating chamber K by abutting the engagement part 2 on the mounting block T and pushing it, and conveying the treatment object X in the heating chamber K to the cooling chamber R by engaging the engagement part 2 with the mounting block T and pulling it. COPYRIGHT: (C)2004,JPO
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