Test structure and process to give process exactness in the production of aligned structures on substrates forms test patterns with displaceable sections

摘要

A test structure to give process exactness in the production of aligned structures on substrates comprises two test patterns (801,803) produced using two masks which have four overlapping sections (8011-8014,8031-8034) which allow process displacement in four different directions. An Independent claim is also included for a process to produce exact alignment as above.