发明名称 HEATING ELEMENT FOR METAL EVAPORATION
摘要 <P>PROBLEM TO BE SOLVED: To provide a long-life heating element (boat) for metal evaporation used in evaporating metal in a vacuum. <P>SOLUTION: The heating element for metal evaporation has cavities on at least two surfaces of a prismatic body made of conductive ceramics. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2004124139(A) 申请公布日期 2004.04.22
申请号 JP20020288331 申请日期 2002.10.01
申请人 DENKI KAGAKU KOGYO KK 发明人 SUGIMOTO ISAO;IGARASHI ATSUKI;WATANABE SHOJIRO
分类号 C04B35/58;C23C14/24 主分类号 C04B35/58
代理机构 代理人
主权项
地址