INSULATING RESIN SHEET PASTING METHOD IN PLASMA TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method which allows no air bubble and wrinkle, and simply pastes when pasting a resin sheet on an electrode for treating plasma having a large area.

SOLUTION: A resin sheet 5 is pasted to an electrode 2 using a difference in conductance between the conductance between the resin sheet 5 and the electrode 2, and the conductance between it and the upper space of the resin sheet 5 by a process returning a decompressed chamber 1 to an atmospheric pressure. The method is realizable using the existing apparatus of a plasma apparatus, and prevents the occurrence of the air bubble and wrinkles without investment in plant and equipment.

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