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发明名称
Vorrichtung zum Messen elektrischer Groessen von Halbleiteranordnungen
摘要
申请公布号
DE1131810(B)
申请公布日期
1962.06.20
申请号
DE1960J017985
申请日期
1960.04.16
申请人
INTERMETALL GESELLSCHAFT FUER METALLURGIE;ELEKTRONIK M.B.H.
发明人
VOGEL RUDOLF
分类号
G01R31/26;H01L21/00
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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