| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic sensor manufacturing method that realizes correct measurement of three-dimensional orientation of an external magnetic field and reduction in manufacturing costs. SOLUTION: The magnetic sensor manufacturing method comprises steps of: preparing a lead frame 10 having at least two stage units 6, 7, a frame unit 9 provided with lead frames 4, 12-14 which are placed around the stage unit 6, 7, and coupling units 12, 13 for coupling these; plastically deforming the coupling units 12, 13 to slant the stage units 6, 7; pressing the stage units 6, 7 while the frame unit 9 is fixed for elastically deforming the coupling units 12, 13; adhering magnetic sensor chips 2, 3 to the stage units 6, 7 while arranging the stage units 6, 7 and a frame unit 9 substantially on the same plane; wiring the magnetic sensor chips 2, 3 to the lead 4; and releasing the stage units 6, 7 to allow the coupling units 12, 13 to recover from the elastic deformation. COPYRIGHT: (C)2004,JPO |
