发明名称 METHOD FOR FORMING SMALL HOLE IN TAPE
摘要 <p><P>PROBLEM TO BE SOLVED: To prevent generation of burrs raised around a small hole when forming the small hole in a tape. <P>SOLUTION: A first sheet 2 is fixed to one side of a tape 1, and a second sheet 3 is fixed to the other side of the tape 1. The tape 1 is held between the first sheet 2 and the second sheet 3. A through hole 6a reaching the second sheet 3 from the first sheet 2 is formed by irradiating laser beams 5 to form a small hole 6. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2004122182(A) 申请公布日期 2004.04.22
申请号 JP20020289718 申请日期 2002.10.02
申请人 DISCO ABRASIVE SYST LTD 发明人 TAKEUCHI MASAYA
分类号 B23K26/00;B23K26/38;B23K101/16;H01L21/301;H01L21/68;H01L21/683;(IPC1-7):B23K26/00 主分类号 B23K26/00
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