发明名称 TRANSISTOR, WAFER, MANUFACTURING METHOD OF TRANSISTOR, MANUFACTURING METHOD OF WAFER, AND FORMING METHOD OF SEMICONDUCTOR LAYER
摘要 PROBLEM TO BE SOLVED: To provide a transistor that has a low cost and long element lifetime. SOLUTION: An indium arsenide (InAs)layer is placed on a gallium arsenide (GaAs) substrate, and an semiconductor layer is placed on the indium arsenide layer, which is larger than the gallium arsenide substrate and has a lattice constant smaller than the indium arsenide layer. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004128415(A) 申请公布日期 2004.04.22
申请号 JP20020294101 申请日期 2002.10.07
申请人 TOSHIBA CORP 发明人 FUJIMOTO HIDETOSHI
分类号 H01L21/205;H01L21/331;H01L21/335;H01L21/338;H01L29/201;H01L29/205;H01L29/26;H01L29/737;H01L29/778;H01L29/812;(IPC1-7):H01L29/201 主分类号 H01L21/205
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