| 摘要 |
PROBLEM TO BE SOLVED: To provide the structure of an organic macromolecular film which can sharply improve the mechanical strength of the organic macromolecular film in the case of utilizing the organic macromolecular film as an interlayer insulating film constituting a semiconductor device. SOLUTION: A benzene ring or a benzo-condensation ring is contained in the main frame of at least one material monomer as a material of an aromatic compound synthesized from a plurality of sorts of material monomers, and a material monomer in which the positions of two substituents of a benzene ring constituting a main chain are para-positions (1, 4) is selected. Therefore, higher mechanical strength can be realized as compared with ortho positions (1, 2-) or meta-positions (1, 3-). COPYRIGHT: (C)2004,JPO
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