Chemical amplification type positive resist composition

摘要

A chemical amplification type positive resist composition, which can attain high sensitivity while maintaining high resolution, and comprises (A) a compound of the following formula (I): wherein, R<1 >represents a hydrocarbon group optionally having a substituent containing an oxygen atom or nitrogen atom or being optionally substituted by a halogen atom; (B) a resin which itself is insoluble or poorly soluble in an alkaline aqueous solution but becomes soluble in an alkaline aqueous solution by the action of an acid; and (C) a quaternary ammonium salt is provided.