| 摘要 |
A scanning system for scanning the surface of a sample. The system includes a scanning head, a mounting arrangement configured for mounting the sample thereon, a drive mechanism configured for providing relative motion between the scanning head and the mounting arrangement, an optical system and an adjustment mechanism. At least part of the optical system is included in the scanning head. The optical system is configured for simultaneously reading from at least two non-overlapping viewing regions of the surface. The adjustment mechanism is configured for adjusting at least part of the optical system so as to vary a spacing of the at least two non-overlapping viewing regions read by the optical system.
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