| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress a structural flaw or combustion anomaly caused by gas irrespective of the amount of ceramic formed bodies to be baked. <P>SOLUTION: The ceramic formed body 16 of laminating a ceramic sheet and an internal electrode is housed in setter 15 for baking, and it is loaded on a baking stand 14. Baking is carried out by heating by a heater 17, but at this time, a pressure in the kiln 11 is detected by a pressure detecting device 18, an exhaust air capacity to an outside of the kiln 11 is determined by a controller 20, and the determined capacity of gas is exhausted by a forced exhaust device 19. By this, produced gas is quickly exhausted out of the kiln, and an interior of the kiln 11 can be constantly maintained in a desired atmosphere. Then, an external electrode is formed in an exposed end face of the internal electrode of a sintered body to provide a multilayer ceramic capacitor. <P>COPYRIGHT: (C)2004,JPO |
