| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method and a laser beam machining apparatus to reduce deposits on a work. <P>SOLUTION: Laser beam is incident on a work, and ions of the polarity reverse to the charged polarity of scattered materials from the work by the laser beam machining are supplied to a scattered material scattering path while conducting laser beam processing. Alternatively, the electric field to give the charged materials scattered from the work the force in a direction away from the work is generated. <P>COPYRIGHT: (C)2004,JPO</p> |
