| 摘要 |
PROBLEM TO BE SOLVED: To obtain a SAW (surface acoustic wave) sensor, various measurement devices, an identification instrument of individual matter which is small, thin shape, and has high performance reducing loss at a high frequency signal transmission time. SOLUTION: The SAW sensor is provided with a SAW element mounting part 11 and a SAW element driving signal generation part 12, the SAW element mounting part 11 includes a SAW element 2 of a comb type electrode and an antenna 4 on a piezoelectric substrate 1, the comb type electrode and the antenna are formed on the same substrate by the same process by thin film formation technology. COPYRIGHT: (C)2004,JPO
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