| 摘要 |
PROBLEM TO BE SOLVED: To perform shape detection of a detection object highly accurately with a simple constitution. SOLUTION: This device is equipped with a measurement abnormality detection means for detecting an abnormal part of an irregularity pattern detection signal corresponding to the surface shape of the detection object acquired by a magnetic shape detection sensor 11, based on a waveform abnormal part of a material detection signal of a magnetic material detection sensor 12. The device can grasp quickly and accurately an abnormal part corresponding to a fluctuation part of a conveyance moving speed in the detection signal from the magnetic shape detection sensor 11, by utilizing the fact that an output waveform from the magnetic material detection sensor 12 becomes a clear deformed shape corresponding to the fluctuation part of the conveyance moving speed of the detection object. COPYRIGHT: (C)2004,JPO
|
