| 摘要 |
PROBLEM TO BE SOLVED: To provide a more precise gas densimeter and a gas density measurement method, while being simple in constitution and low in price. SOLUTION: A pocket section 21 is formed in a recessed shape on the inner wall of a gas channel 20 where gas to be measured passes, and a microflow sensor 1', having first to fourth thermopiles, is mounted into the pocket section 21. Then, the density of the gas to be measured is obtained by using at least either one of the first to fourth temperature detection signals outputted from each of the first to fourth thermopiles. Or, at least two of the first to fourth thermopiles are utilized to obtain the density of the gas to be measured. Furthermore, to prevent influence of the flow of the gas to be measured passing through the gas channel 20, the aperture of an opening 21A leading from the pocket section 21 to the gas channel is made sufficiently smaller than the volume of the pocket section 21. COPYRIGHT: (C)2004,JPO
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