POROUS CERAMIC MATERIAL AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a porous ceramic material having a surface ceramic layer rich in micropores and capable of being used even in a high temperature condition, and a method of manufacturing the porous ceramic material. SOLUTION: The method of manufacturing the porous ceramic material is performed by preparing a porous ceramic supporting body (120) having a precursor polymer of a non-oxide ceramic consisting essentially of silicon at least on a part of the surface part, applying the thermal decomposition pretreatment to the supporting body and thermally decomposing the precursor polymer to form the porous non-oxide ceramic layer rich in the micropores on the surface part of the supporting body. In the thermal decomposition pretreatment, the supporting body is held for≥1 hr at about≥40°C being a temperature at which the precursor polymer is substantially not thermally decomposed or the supporting body is arranged in a pressure vessel (101) and is held at a temperature that the precursor polymer is substantially not thermally decomposed while pressurizing the inside of the vessel to≥0.12 MPa. COPYRIGHT: (C)2004,JPO