Misalignment amount detection apparatus and alignment apparatus, and accuracy analysis apparatus with the alignment apparatus

摘要

The apparatus has a rotary encoder (35) with a rotatable unit secured on a base on a rotary table (83) and another unit secured to a lower face of another base. A movable body on the latter base is movable along an axis and another body on the former body moves along another axis. The former body is movable along the two axes when the table is rotated while the latter body is restrained. An independent claim is also included for an alignment apparatus.