发明名称 |
Electrostatically operated optical switching or attenuating devices |
摘要 |
In an electrostatically operated device manufactured by use of micromachining technology comprising: a stationary electrode substrate (8); a movable plate-like electrode (2) disposed substantially in parallel with said stationary electrode substrate; and means for supporting said movable plate-like electrode to be movable toward and away from the stationary electrode substrate, a drive voltage less than the pull-in voltage is applied between the stationary electrode substrate and the movable plate-like electrode thereby to electrostatically drive the movable plate-like electrode. In addition, the electrode-to-electrode distance between the movable plate-like electrode and the stationary electrode substrate when any drive voltage is not applied is set to a value greater than three times a distance that the movable plate-like electrode moves when it is electrostatically driven by application of a drive voltage less than the pull-in voltage. |
申请公布号 |
EP1346948(A3) |
申请公布日期 |
2004.04.21 |
申请号 |
EP20030006171 |
申请日期 |
2003.03.19 |
申请人 |
JAPAN AVIATIONELECTRONICS INDUSTRY, LIMITED |
发明人 |
NORIMATSU, TOSHIHIDE |
分类号 |
B81B3/00;G02B6/35;G02B26/08;H02N1/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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