发明名称 METHOD FOR FABRICATING A SUBSTRATE FOR AN ELECTRO-OPTICAL DEVICE AND A METHOD FOR FABRICATING THE ELECTRO-OPTICAL DEVICE TO QUICKLY AND INEXPENSIVELY FABRICATE A CONCAVO-CONVEX SHAPE OF A REFLECTIVE SURFACE
摘要 PURPOSE: A method for fabricating a substrate for an electro-optical device and a method for fabricating the electro-optical device to quickly and inexpensively fabricate a concavo-convex shape of a reflective surface are provided to enhance the reflective-type display quality of the electro-optical device by improving the scattering characteristic of the reflective surface. CONSTITUTION: In an exposure process, a photosensitive resin(101) disposed on a substrate(111) is exposed using a mask pattern having a light transmission part(102x) and a light shielding part. In a developing process, the exposed resin is developed. In a reflective layer forming process, a reflective layer(112) is formed on the resin. In the exposure process, the resin is exposed in a state in which the exposure strength distribution on the surface of the resin is increased and decreased as a curved shape along the corresponding surface. In the developing process, a resin layer having a surface concavo-convex shape corresponding to the exposure strength distribution is formed.
申请公布号 KR20040033258(A) 申请公布日期 2004.04.21
申请号 KR20030070481 申请日期 2003.10.10
申请人 SEIKO EPSON CORPORATION 发明人 OTAKE TOSHIHIRO;MATSUO MUTSUMI
分类号 G02B5/02;G02B5/08;G02F1/1335;H01L21/00;H01L51/52;H01L51/56;(IPC1-7):G02F1/133 主分类号 G02B5/02
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