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发明名称
Electrostatic micro-actuator
摘要
申请公布号
GB0405757(D0)
申请公布日期
2004.04.21
申请号
GB20040005757
申请日期
2004.03.15
申请人
AL-CHALABI, SALAH A
发明人
分类号
B81B5/00;B81C1/00
主分类号
B81B5/00
代理机构
代理人
主权项
地址
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