发明名称 DEVICE FOR TRANSFERRING STRUCTURES
摘要 An apparatus for transferring structures to a layer to be patterned. The apparatus has a base element and at least one radiation-conducting structure projecting from the base element. The radiation-conducting structure guides radiation to an exit aperture facing away from the base element and the shape of which structure is matched to that of the structure to be transferred.
申请公布号 EP0993627(B1) 申请公布日期 2004.04.21
申请号 EP19980942489 申请日期 1998.07.02
申请人 INFINEON TECHNOLOGIES AG 发明人 RUF, ALEXANDER
分类号 B82B1/00;G03F1/00;G03F7/20;H01L21/027 主分类号 B82B1/00
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