APPARATUS AND METHOD FOR CONTROLLING THE TEMPERATURE OF AN INTEGRATED CIRCUIT DEVICE

摘要

An apparatus and method for controlling the temperature of an integrated circuit device includes a refrigerant system having a coolant loop containing refrigerant, an evaporator, a compressor, and a condenser. The condenser has a variable speed fan controlled to maintain the temperature of the refrigerant at a predetermined value. In a refrigeration system used to cool an integrated circuit device, a method for controlling refrigerant pressure by comparing the refrigerant temperature at a predetermined location to a predetermined value and varying the cooling applied to the condenser.