| 摘要 |
FIELD: nanotechnology; displacement of probes or specimens in probing microscopy. SUBSTANCE: piezoscanner that provides for movement in three coordinates (X, Y, Theta) in object plane and in one coordinate perpendicular to object plane has base mounting first piezotube secured thereon at one end and provided with electrodes on inner and outer surfaces; first junction member mounted on other end of first piezotube incorporates second piezotube secured on this member at one end and provided with four separated electrodes X21, X22, Y21, Y22 on outer surface and four separated electrodes, on inner surface which are disposed against outer electrodes X21, X22, Y21, Y22.; second junction member mounted on other end of second piezotube and provided with third piezotube secured thereon at one end, this piezotube having four separated electrodes X31, X32, Y31, Y32 on outer surface and four separated electrodes , on inner surface which are disposed against respective outer electrodes X31, X32, Y31, Y32; secured on other end of third piezotube is object holder. Symmetry axes of second-piezotube electrodes are aligned with those of respective third-piezotube electrodes . Electrodes of second and third piezotubes are so connected that their bend is ensured in phase opposition. First piezotube has outer and inner electrodes Z and Z . EFFECT: enlarged functional capabilities. 8 cl, 11 dwg |
